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New Development of Silicon Heterojunction Solar Cells
Li Zheng-Ping, Yang Li-Fei, Shen Wen-Zhong
2019, 39 (1):
1-22.
PDF (32202KB)
(
995
)
Silicon heterojunction (SHJ) solar cells are featured by depositing amorphous silicon (a-Si:H) thin
films on the crystalline silicon (c-Si) wafers, which integrate the advantages of c-Si and a-Si:H solar
cells such as simple cell structure, low process temperature, good passivation, high open-circuit
voltages, low temperature coefficient, and bifacial characteristics. Therefore, SHJ solar cell is a
researching/developing focus for achieving high efficiency c-Si solar cells in recent years. In the
present review paper, we firstly summarize the new processes development of fabricating SHJ solar
cells, which including the cleaning of wafers by ozone (O3), the deposition of a-Si:H thin films
by hot wires chemical vapor deposition (HWCVD), the novel deposition method of transparent
conducting oxides (TCO) films and improvement in TCO materials, and the application of new
methods for metallization. Then the advanced technologies such as back junction and carrier selective
passivating contacts, which are combined with SHJ solar cells, are introduced in this paper,
together with the progress of thin SHJ solar cells. Further, the state-of-the-art interdigitated back
contact SHJ (IBC-SHJ) and perovskite/SHJ two terminals tandem solar cells are analyzed, which
show that the SHJ solar cell is the footstone for higher efficiency silicon-based solar cells.
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