Progress in Physics ›› 2020, Vol. 40 ›› Issue (3): 69-83.

Special Issue: 2022年, 第42卷

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Femtosecond laser processing of lithium niobate crystal: principle and applications

Zhou Chao, Ma Jia-Nan, Xu Xiao-Yi, Xu Chuan, Zhang Yong, Zhu Shi-Ning, Xiao Min   

  1. 1. National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, and School of Physics, Nanjing University, Nanjing 210093, China; 2. Department of Physics, University of Arkansas, Fayetteville, Arkansas 72701, USA

  • Online:2020-10-12 Published:2020-10-12

Abstract:

Femtosecond (fs)-laser micromachining is an effective material processing method because of its ultrashort pulse width and extremely high peak intensity. Fs-laser micromachining technology has been widely used to process photonic integrated devices. Lithium niobate (LN) crystal is a common material in integrated and guided-wave optics because of its excellent electro-optic, nonlinear optical, and piezoelectric properties. This review describes fs-laser processing of LN crystal, mainly focusing on the physical principle of fs-laser processing and the recent advances of LN-based photonic devices. Fs-laser technology makes LN crystal a promising platform in the field of micro-nano photonics.

Key words: femtosecond laser, lithium niobate, waveguides, nonlinear photonic crystals, laser processing