物理学进展

物理学进展 ›› 2020, Vol. 40 ›› Issue (3): 69-83.

所属专题： 2022年, 第42卷

• •    下一篇

飞秒激光加工铌酸锂晶体：原理与应用

周超，马嘉男，顼晓仪，徐钏，张勇 ，祝世宁，肖敏   

  1. 1. 南京大学现代工程与应用科学学院、物理学院，固体微结构物理国家重点实验室，南京，中国，210093；2. 阿肯色大学物理系，费耶特维尔，阿肯色州，美国，72701

  • 出版日期:2020-10-12 发布日期:2020-10-12

Femtosecond laser processing of lithium niobate crystal: principle and applications

Zhou Chao, Ma Jia-Nan, Xu Xiao-Yi, Xu Chuan, Zhang Yong, Zhu Shi-Ning, Xiao Min   

  1. 1. National Laboratory of Solid State Microstructures, College of Engineering and Applied Sciences, and School of Physics, Nanjing University, Nanjing 210093, China; 2. Department of Physics, University of Arkansas, Fayetteville, Arkansas 72701, USA

  • Online:2020-10-12 Published:2020-10-12

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摘要：

由于具有超短的脉冲宽度和极高的峰值强度，飞秒激光微加工是一种有效的材料加工方法， 已广泛应用于光子集成器件的加工。铌酸锂晶体具有优异的电光、非线性光学和压电特性，是集成 光学和导波光学中常见的材料。本文综述了飞秒激光对铌酸锂晶体的处理，重点介绍了飞秒激光加 工的物理原理及其制备的铌酸锂基光子器件的最新进展。飞秒激光技术使铌酸锂晶体在微纳光子学 领域具有广阔的应用前景。

关键词: 飞秒激光, 铌酸锂, 波导, 非线性光子晶体, 激光加工

Abstract:

Femtosecond (fs)-laser micromachining is an effective material processing method because of its ultrashort pulse width and extremely high peak intensity. Fs-laser micromachining technology has been widely used to process photonic integrated devices. Lithium niobate (LN) crystal is a common material in integrated and guided-wave optics because of its excellent electro-optic, nonlinear optical, and piezoelectric properties. This review describes fs-laser processing of LN crystal, mainly focusing on the physical principle of fs-laser processing and the recent advances of LN-based photonic devices. Fs-laser technology makes LN crystal a promising platform in the field of micro-nano photonics.

Key words: femtosecond laser, lithium niobate, waveguides, nonlinear photonic crystals, laser processing